Vertical Interferometer System 

  • precision vertical downward looking interferometer system for full aperture testing of optics in production-, quality inspection- and metrology lab environments
  • optimized for the use in combination with sub-aperture polishing- and correction processes on flat optics, spheres and aspheres
  • integrated features and technologies for perfect alignment of measuring data with the coordinate system/axis of sub aperture correction machines for achievement of highest correction quality and efficiency
  • natural granite column with extremely flat and precise guiding surfaces provide for ease of use and very accurate measurement of radius of curvature on optical components
  • highly precise and accurate linear scale with exceptional resolution, directly interfaced to fringe analysis software
  • measurement table(s) is balanced and guided on air bearing slide for quick, easy and accurate setup and movement
  • fully closed measuring area with innovative door system for precise and reliable, undisturbed measurements
  • robust vibration damping system, prefect for use in industrial production environments
  • XONOX X-fiz 100 (4") or X-fiz 130 (5.2") high performance Fizeau interferometer with electronic control of optical zoom (1x to 10x), focus and contrast
  • innovative, powerful and user friendly fringe analysis system X-fringe² with different smart and intelligent modes to suit various applications
  • choose from low cost "ST" version with static fringe analysis up to high performance "PS2" phase shifting version
  • additionally available in a "tower only" version "B" for integrating existing or 3rd party interferometer units or version "Z" equipped with ZYGO Verifire and ZYGO MX fringe analysis software 

TECHNICAL DATA VT1000DL

  • WORKING RANGE

    min. 1000mm travel, up to 250mm test diameter (depending on used TS and part holder) 

    + micrometer fine adjustment for easy and precise setting of cats eye and confocal position 

  • VERSIONS
    • VT1000 DL ST with XONOX X-fiz 100 (4") / X-fiz 130 (5.2") with 10x optical zoom and static fringe analysis system XONOX "X-fringe ST" 
    • VT1000 DL PS2 with XONOX X-fiz 100 (4") / X-fiz 130 (5.2") with 10x optical zoom, phase shifting fringe analysis system XONOX "X-fringe²" and piezo phase shifter XONOX "X-phase PMR"
    • VT1000 DL Z with ZYGO Verifire 4" or 6" interferometer unit and Mx phase shifting fringe analysis
    • VT1000 DL B "tower only" version for integrating existing interferometer units.
    • Optionally with XONOX fringe analysis system X-fringe ST or X-fringe PS2 with X-phase PMR phase shifter.
    • All Versions can be equipped with 1 or 2 measuring slides and CGH multi axis holder on request
  • MEASURING SYSTEM

    incremental high precision linear measuring system with PC interface with temperature expansion compensation function (standard) / alternatively laser distance measuring system (option)

  • MEASURING ACCURACY

    up to +/- 0.7μm per 500mm @ 20°C, up to 0.1µm resolution (standard 0.5µm)

  • DIMENSIONS (WxDxH) / Weight

    1200 x 900 x 2800 mm when using touch screen for fringe analysis (additional space required if PC is used for fringe analysis, XONOX PC-table optionally available) / approx. 950kg

  • CONNECTIONS

    110-240 V / 50-60 Hz, compressed air: 6 bar

  • COLOR

    Light grey RAL 7035